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Alois Herkommer received his PhD in physics in 1995 from
the University of Ulm in the area of quantum optics. In 1996 he joined Carl
Zeiss in Oberkochen and worked on the optical design of high performance
lithographic and metrology systems. From 2000 to 2005 he was with the optical
design group at Carl Zeiss Laser Optics GmbH. Afterwards he headed the
illumination design group and later the systems design group at the Carl Zeiss
SMT GmbH. In 2011he joined the Institut für Technische Optik at the University
of Stuttgart.
His research interests are:
optical design of imaging and illumination systems, novel optical systems
concepts, optical system analysis and simulation, design and simulation
methods, medical applications of optical systems. |
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