| Module: Advanced CMOS Devices and Technology |
|---|
| Lecturer: Burghartz, 6 Credit Points |
| Prerequisites |
Basics in microelectronics and semiconductor technology |
| Course Outline |
Coherent Description of CMOS-Technology
- History and Basics of IC Technology
- Process Technology I and II
- Process Modules
- MOS Capacitor
- MOS Transistor
- Non-Ideal MOS Transistor
- Basics of CMOS Circuit Integration
- CMOS Device Scaling
- Metal-Silicon Contact
- Interconnects
- Design Metrics
- Special MOS Devices
- Future Directions
|
| Learning Outcome |
Comprehensive understanding of the integration of microelectronic devices and interconnects for circuit integration, including aspects of process technology, miniaturization, optimization, compact modeling, basic circuit building blocks and volume manufacturing.
|
| References and Books |
- Burghartz, Joachim: Skript „Advanced CMOS Devices and Technology“ (in Vorbereitung)
- Neamon, Donald: Semiconductor Physics and Devices, Mc Graw-Hill, 2002
- Wolf, Stanley: Silicon Processing fort he VLSI Era, Vol. 2, Lattice Press, 1990
- Sze, Simon: Physics of Semiconductor Devices, 2nd Ed., Wiley Interscience, 1981
- Sze, Simon: Fundamentals of Semiconductor Fabrication, Wiley Interscience, 2003
|
